Описание

Shape Measurement Laser Microscope
Model VK-X210
Type Measurement unit
Objective lens magnification Magnification on a 15” monitor 200x 10?
Magnification on a 15” monitor 400x 20?
Magnification on a 15” monitor 1000x 50?
Magnification on a 15” monitor 3000x 150?
Observation/ measuring range Horizontal (H): ?m Magnification on a 15” monitor 200x 1350
Magnification on a 15” monitor 400x 675
Magnification on a 15” monitor 1000x 270
Magnification on a 15” monitor 3000x 90
Vertical (V): ?m Magnification on a 15” monitor 200x 1012
Magnification on a 15” monitor 400x 506
Magnification on a 15” monitor 1000x 202
Magnification on a 15” monitor 3000x 67
Working distance: mm Magnification on a 15” monitor 200x 16.5
Magnification on a 15” monitor 400x 3.1
Magnification on a 15” monitor 1000x 0.35
Magnification on a 15” monitor 3000x 0.2
Numerical Aperture (N.A.) Magnification on a 15” monitor 200x 0.3
Magnification on a 15” monitor 400x 0.46
Magnification on a 15” monitor 1000x 0.95
Magnification on a 15” monitor 3000x
Optical zoom 1x to 8x
Total magnification 200x to 24000x
Optical system for observation/measurement Pinhole confocal optical system
Height measurement Measuring range 7 mm
Z-resolution 0.0005 µm
Repeatability ? 0.012 µm*1
Width measurement Display resolution 0.001 µm
Repeatability 3? 0.02 µm*2
Frame memory Pixel count 2048 x 1536, 1024 x 768, 1024 x 64
For monochrome image 16 bit
For colour image 8-bit for RGB each
For height measurement 24-bit
Frame rate Surface scan 4 Hz to 120 Hz
Line scan 7900 Hz
Auto function AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings
Measurement laser light source for measurements Wavelength Violet laser, 408 nm
Maximum output power 0.95 mW
Laser Class Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3)
Laser light-receiving element PMT (Photoelectron Multiplier Tube)
Light source for optical observation Lamp 100 W halogen lamp
Colour camera for optical observation Imaging element 1/3' Colour CCD image sensor
Recording resolution Super high resolution (3072?2304)
Auto adjustment Gain, Shutter speed
Data processing unit Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4
Software Auto-focus software This is software that automatically focuses the image during observation.
Pixel shift software This is software that increases the number of pixels recorded by shifting pixels during image recording.
HDR function software This is software that obtains 16-bit data to optimize the image appearance.
RPD function software This is an algorithm that detects the measurement result quickly and accurately.
AAG function software This is software that automatically adjusts the laser light-receiving sensitivity within the setting range.
Auto upper/lower limit setting software This is software that automatically recognizes the upper and lower limits of the target and sets the measurement range.
Beginner mode function software This is software that can be used to easily perform measurements as flow charts.
Comment function software This is software that displays comments on the observation screen.
Measurement and scale display software This is software that displays a scale on the dimension measurement and observation screen.
Rating Power voltage 100 to 240 VAC ±10 %, 50/60 Hz
Power consumption 450 VA max.
Weight Approx. 26 kg (Measuring head detached: approx. 10 kg)
*1 When a standard height difference of 2 µm is measured with the 50x objective lens. *2 When the KEYENCE reference chart line width of 1 µm is measured with the 150 x objective lens in line peak mode (image averaging: 8 times). *3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50. *4 Windows 7 is a registered trademark of Microsoft, U.S.A.
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